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Yield Engineering Systems, Inc.

 
 
 
 

YES-Series Vacuum bake / Vapor prime and Image Reversal Systems

The YES-series Vacuum Bake/Vapor Prime Systems have been supporting the semiconductor industry with quality, reliability, and accuracy since 1980.

HMDS priming has always been accepted as the first and possibly the most important step in the yellow room. With the advent of new process surfaces, metals, and exotic resists and priming liquids it helps to have army of process engineers who have tackled these problems and can pass on process help in new challenges.
 
 
MODELS
Vacuum Bake/Vapor Prime Model YES-3TA Model YES-5TA
Image Reversal Model YES-10TA Model YES-8TA
Dual Function
Vapor Prime/Image Reversal

Model YES-310TA

Model YES-58TA
     
SPECIFICATIONS
CLEANLINESS
(Typical Results)
less than 10x1 micron
particles per 4” wafer
less than 5x1 micron
particles per 6” wafer
CAPACITY
Vapor Prime

8 cassettes of 4” wafers. Removable shelf for 2 cassettes of 6” wafers or 1 cassette of 8” wafers

8 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers. Remove shelf to accommodate up to 2 cassettes of 12” wafers.
Image Reversal 4 cassettes of 4” wafers. Removable shelf for 2 cassettes of 6” wafers or 1 cassette of 8” wafers 4 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers. Remove shelf to accommodate up to 2 cassettes of 12” wafers.
THROUGHPUT
Vapor Prime
Image Reversal

2 loads/hr
1 load/hr

2 full loads/hr
1 load/hr
HMDS USAGE
Vapor Prime

< 4 ml/200 wafers
(120 prime cycles/pint)

< 5 ml/200 wafers
(75 prime cycles/pint)
AMMONIA USAGE
Image Reversal

1 Cu. Ft.

2 Cu. Ft.
TEMPERATURE
Stability During Process
Uniformity
160° C max
± 2° C
± 5° C
160° C max
± 2° C
± 5° C
DIMENSIONS
Chamber

12" (305mm) High
12" (305mm) Wide
13.25" (336mm) Deep

16" (406mm) High
16" (406mm) Wide
18" (599mm) Deep
System 27.5" (699mm) High
23.75" (603mm) Wide
19.5" (495mm) Deep
31.75" (806mm) High
27.75" (705mm) Wide
23" (584mm) Deep
WEIGHT
System
System & Crate

160 pounds
310 pounds

245 pounds
400 pounds
POWER
System: Domestic
System: International

115V, 60Hz, 1 Phase, 20A
240V, 50Hz, 1 Phase, 10A

115V, 60Hz, 1 Phase, 20A
240V, 50Hz, 1 Phase, 10A
Vacuum Pump: Domestic
Vacuum Pump: International
115V, 60Hz, 1 Phase, 7A
220V, 50Hz, 1 Phase, 3.5A
115V, 60Hz, 1 Phase, 7A
220V, 50Hz, 1 Phase, 3.5A
 
MODELS
Vacuum Bake/Vapor Prime Model YES-15 Model YES-6112
Image Reversal Model YES-18  
Dual Function
Vapor Prime/Image Reversal

Model YES-1518

     
SPECIFICATIONS
CLEANLINESS
(Typical Results)
less than 1x1 micron particle and less than 10x0.5 micron particles per 6” wafer less than 10x0.5 micron particles per 8” wafer
CAPACITY
Vapor Prime

8 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers (shelf not removable)

8 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers or 4 cassettes of 8” wafers (shelf not removable)
Image Reversal 4 cassettes of 5 or 6” wafers or 2 cassettes of 4” wafers (shelf not removable)  
THROUGHPUT
Vapor Prime
Image Reversal

2 full loads/hr
1 load/hr

2 full loads/hr
1 load/hr
HMDS USAGE
Vapor Prime

< 5 ml/200 wafers
(75 prime cycles/pint)

< 7 ml/200 wafers
(>50 prime cycles/pint)
AMMONIA USAGE
Image Reversal

2 Cu. Ft.

TEMPERATURE
Stability During Process
Uniformity
160° C max
± 2° C
± 5° C
160° C max
± 2° C
± 8° C
DIMENSIONS
Chamber

16" (406mm) High
16" (406mm) Wide
16" (406mm) Deep

20" (508mm) High
20" (508mm) Wide
15.12" (384mm) Deep
System 32" (812mm) High
27.75" (705mm) Wide
24" (609mm) Deep
26" (660mm) High
39.00" (991mm) Wide
25" (635mm) Deep
WEIGHT
System
System & Crate

300 pounds
450 pounds

350 pounds
500 pounds
POWER
System: Domestic
System: International

115V, 60Hz, 1 Phase, 15A
220V, 50Hz, 1 Phase, 7.5A

115V, 60Hz, 1 Phase, 30A
220V, 50Hz, 1 Phase, 15A
Vacuum Pump: Domestic
Vacuum Pump: International
115V, 60Hz, 1 Phase, 7A
220V, 50Hz, 1 Phase, 3.5A
115V, 60Hz, 1 Phase, 7A
220V, 50Hz, 1 Phase, 3.5A