YES-Series Vacuum bake / Vapor prime and Image Reversal Systems

The YES-series Vacuum Bake/Vapor Prime Systems have been supporting the semiconductor industry with quality, reliability, and accuracy since 1980.

HMDS priming has always been accepted as the first and possibly the most important step in the yellow room. With the advent of new process surfaces, metals, and exotic resists and priming liquids it helps to have army of process engineers who have tackled these problems and can pass on process help in new challenges.

MODELS
Vacuum Bake/Vapor Prime	Model YES-3TA	Model YES-5TA
Image Reversal	Model YES-10TA	Model YES-8TA
Dual Function Vapor Prime/Image Reversal	Model YES-310TA	Model YES-58TA

SPECIFICATIONS
CLEANLINESS (Typical Results)	less than 10x1 micron particles per 4” wafer	less than 5x1 micron particles per 6” wafer
CAPACITY Vapor Prime	8 cassettes of 4” wafers. Removable shelf for 2 cassettes of 6” wafers or 1 cassette of 8” wafers	8 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers. Remove shelf to accommodate up to 2 cassettes of 12” wafers.
Image Reversal	4 cassettes of 4” wafers. Removable shelf for 2 cassettes of 6” wafers or 1 cassette of 8” wafers	4 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers. Remove shelf to accommodate up to 2 cassettes of 12” wafers.
THROUGHPUT Vapor Prime Image Reversal	2 loads/hr 1 load/hr	2 full loads/hr 1 load/hr
HMDS USAGE Vapor Prime	< 4 ml/200 wafers (120 prime cycles/pint)	< 5 ml/200 wafers (75 prime cycles/pint)
AMMONIA USAGE Image Reversal	1 Cu. Ft.	2 Cu. Ft.
TEMPERATURE Stability During Process Uniformity	160° C max ± 2° C ± 5° C	160° C max ± 2° C ± 5° C
DIMENSIONS Chamber	12" (305mm) High 12" (305mm) Wide 13.25" (336mm) Deep	16" (406mm) High 16" (406mm) Wide 18" (599mm) Deep
System	27.5" (699mm) High 23.75" (603mm) Wide 19.5" (495mm) Deep	31.75" (806mm) High 27.75" (705mm) Wide 23" (584mm) Deep
WEIGHT System System & Crate	160 pounds 310 pounds	245 pounds 400 pounds
POWER System: Domestic System: International	115V, 60Hz, 1 Phase, 20A 240V, 50Hz, 1 Phase, 10A	115V, 60Hz, 1 Phase, 20A 240V, 50Hz, 1 Phase, 10A
Vacuum Pump: Domestic Vacuum Pump: International	115V, 60Hz, 1 Phase, 7A 220V, 50Hz, 1 Phase, 3.5A	115V, 60Hz, 1 Phase, 7A 220V, 50Hz, 1 Phase, 3.5A

MODELS
Vacuum Bake/Vapor Prime	Model YES-15	Model YES-6112
Image Reversal	Model YES-18
Dual Function Vapor Prime/Image Reversal	Model YES-1518

SPECIFICATIONS
CLEANLINESS (Typical Results)	less than 1x1 micron particle and less than 10x0.5 micron particles per 6” wafer	less than 10x0.5 micron particles per 8” wafer
CAPACITY Vapor Prime	8 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers (shelf not removable)	8 cassettes of 5 or 6” wafers or 12 cassettes of 4” wafers or 4 cassettes of 8” wafers (shelf not removable)
Image Reversal	4 cassettes of 5 or 6” wafers or 2 cassettes of 4” wafers (shelf not removable)
THROUGHPUT Vapor Prime Image Reversal	2 full loads/hr 1 load/hr	2 full loads/hr 1 load/hr
HMDS USAGE Vapor Prime	< 5 ml/200 wafers (75 prime cycles/pint)	< 7 ml/200 wafers (>50 prime cycles/pint)
AMMONIA USAGE Image Reversal	2 Cu. Ft.
TEMPERATURE Stability During Process Uniformity	160° C max ± 2° C ± 5° C	160° C max ± 2° C ± 8° C
DIMENSIONS Chamber	16" (406mm) High 16" (406mm) Wide 16" (406mm) Deep	20" (508mm) High 20" (508mm) Wide 15.12" (384mm) Deep
System	32" (812mm) High 27.75" (705mm) Wide 24" (609mm) Deep	26" (660mm) High 39.00" (991mm) Wide 25" (635mm) Deep
WEIGHT System System & Crate	300 pounds 450 pounds	350 pounds 500 pounds
POWER System: Domestic System: International	115V, 60Hz, 1 Phase, 15A 220V, 50Hz, 1 Phase, 7.5A	115V, 60Hz, 1 Phase, 30A 220V, 50Hz, 1 Phase, 15A
Vacuum Pump: Domestic Vacuum Pump: International	115V, 60Hz, 1 Phase, 7A 220V, 50Hz, 1 Phase, 3.5A	115V, 60Hz, 1 Phase, 7A 220V, 50Hz, 1 Phase, 3.5A