450°C High Temperature Vacuum Cure Ovens

The YES PB series of High Temperature, Air Cooled, Laminar Flow Overs are the result of many years experience in the design and manufacture of low particle ovens.

Operating at temperatures up to 450°C, the systems come with a simple guarantee: substrates will be cleaner after processing than they were when they began. This is due to our patented laminar flow process.

SPECIFICATIONS
SYSTEM	6-2P	8-2P	12-2P
Max. Capacity	2 cassettes, 6” wafer	2 cassettes, 8” wafer	2 cassettes, 12” wafer
Max. Heat Up Rate (Wafer)	16°C/min	15°C/min	10°C/min
Max. Cool Down Rate (Wafer)	5-7°C/min	5-7°C/min	4-5°C/min
Temperature Range	Ambient to 450°C
Uniformity	±3.5°C	±3.5°C	±5°C
Interior Chamber Dimensions	10.75” I.D. (Barrel) x 7.5” H x 22.2” D	14.4” I.D. (Barrel) x 9.9” H x 25.7” D	21” I.D. (Barrel) x 14” H x 26” D
Chamber Working Area	1 Compartment 6.4” W x 6.6” H x 14.24” D	1 Compartment 9.4” W x 9.0” H x 18.1” D	1 Compartment 15.1”W x 13.6” H x 19.2” D
Chamber Material	316 L Stainless Steel
Oven & Controller Exterior	Paint (standard) Stainless Steel (optional)
Controller Dimensions	20.5” W x 6.5” H x 19.0” D
Shipping Weight, Crated (approx.)	450 lbs.	550 lbs.	700 lbs.
Electrical	208V, 3 phase, 4 wire, 40 amps		208V, 3 phase, 4 wire, 50 amps
Vacuum Pump	System requires 16 cfm, single stage vacuum pump Optional – Sogevac SV40, 28 cfm, 208V, 3 phase, 4 wire, 6.8 amps
Plumbing/Tubing	316 Stainless Steel – Vacuum Plumbing 3/8” – Gas Plumbing 1/4”
Swagelok® Fittings	316 Stainless Steel
Door Plate	316 Stainless Steel
System Process Pressure	800 millitorr to 760 torr with standard 28 cfm single stage (Standard process 200 torr) Optional larger plumbing for low process pressure

SPECIFICATIONS
SYSTEM	6-8P	8-4P	Fast Ramp
Max. Capacity	8 cassettes, 6” wafer	4 cassettes, 8” wafer	2 cassettes, 8” wafer
Max. Heat Up Rate (Wafer)	3-4°C/min	3-4°C/min	10°C/min
Max. Cool Down Rate (Wafer)	3-4°C/min	3-4°C/min	4-6°C/min
Temperature Range	Ambient to 450°C
Uniformity	±6°C	±8°C	±1.0°C
Interior Chamber Dimensions	16.5” W x 18.2” H x 16.0” D	20.25” W x 23.9” H x 120” D	14.4” I.D. (Barrel) x 9.5” H x 20.5” D
Chamber Working Area	4 Compartment 8.0” W x 7.8” H x 14.5” D	4 Compartment 10.0” W x 10.58” H x 10.58” D	1 Compartment 9.4” W x 9.0” H x 18.1” D
Chamber Material	316 L Stainless Steel
Oven & Controller Exterior	Paint (standard) Stainless Steel (optional)		Stainless Steel (standard)
Controller Dimensions	20.5” W x 6.5” H x 19.0” D
Shipping Weight, Crated (approx.)	980 lbs.	960 lbs.	1200 lbs.
Electrical	220V, 3 phase, 4 wire, 30 amps		208V, 3 phase, 4 wire, 40 amps
Vacuum Pump	System requires 16 cfm, single stage vacuum pump Optional – Sogevac SV40, 28 cfm, 208V, 3 phase, 4 wire, 6.8 amps
Plumbing/Tubing	316 Stainless Steel – Vacuum Plumbing 3/8” – Gas Plumbing 1/4”
Swagelok® Fittings	316 Stainless Steel
Door Plate	316 Stainless Steel
System Process Pressure	800 millitorr to 760 torr with standard 28 cfm single stage (Standard process 200 torr) Optional larger plumbing for low process pressure