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C&D Semiconductor Services, Inc.
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SVG 8x Track Systems
Coat-Developer-Scrubber
The SVG 8x Systems have been used in production since the early 1980s. They have been proven to be a true “work horse”. The process modules are easily removed for troubleshooting or preventive maintenance. System cabinets can be built large enough to make room for future modules. |
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| C&D remanufactures, refurbishes, and rebuilds all 8X SVG linear track systems. C&D can refurbish or rebuild track systems to SVG orginal specifications or reconfigure existing tracks with C&D’s innovative upgrades. The SVG 86X belt transfer system works well for square or rectangular substrates while the SVG88X transfer arms provide minimal contact with the backside of the wafer. SVG 86X can run 2''- 6 substrates and the SVG 88X can run 2''- 8'' substrates. |
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| System Features |
- Clean dispense line tips
- Dual size bridging without hardware changeover on 88X
- Recipe Master
- Upgraded ATS arms for repeatability
- Low Turbulence Catch Cup
- 88X systems for 2”- 8” wafers
- Square substrates on 86X systems
- CE Mark
- High performance motors for improved uniformity and reliability
- Sub micron capability
- Digital Vacuum Switches
- Flood Expose
- AutoCAD layout drawings
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